Nowadays it has been widely accepted that the quality of software highly depends on the process that iscarried out in an organization. As part of the effort to support software process engineering activities, the researchon software process modeling and analysis is to provide an effective means to represent and analyze a process and,by doing so, to enhance the understanding of the modeled process. In addition, an enactable process model canprovide a direct guidance for the actual development process. Thus, the enforcement of the process model candirectly contribute to the improvement of the software quality. In this paper, a systematic review is carried out tosurvey the recent development in software process modeling. 72 papers from 20 conference proceedings and 7journals are identified as the evidence. The review aims to promote a better understanding of the literature byanswering the following three questions: 1) What kinds of paradigms are existing methods based on? 2) What kinds of purposes does the existing research have? 3) What kinds of new trends are reflected in the current research? Afterproviding the systematic review, we present our software process modeling method based on a multi-dimensionaland integration methodology that is intended to address several core issues facing the community.